3dct

3D X-ray CT system XVA-160αII"Z"

High-end Nano-focus model, ideal for inspection & analysis of semiconductors & electronic components.

Technical Data

Flat panel detector

Eucentric function

High magnification (2,000x)

Focus size switching function (250/800nm)

High precision manipulator

Optical axis/rotation center/focus automatic adjustment function

Option

3D oblique CT

Visible image mapping

Virtical CT

Case example

Fingerprint sensor
(2D image)

Fingerprint sensor
(CT cross-section image)

Fingerprint sensor
(CT cross-section image 150X)

Fingerprint sensor
(Dimensional measurement)

Electromigration
(CT cross-section image)

We would be happy to provide you with extra case examples. Please reach out to our sales team for more information.

3DCT Series

TECHNOLOGY

Eucentric function

High magnification